[J-5-4] Tri-Gate Poly-Si TFTs Fabricated by CW Laser Lateral Crystallization for Improvement of Electron Transport Properties

S. Fujii¹、Y. Kawasaki¹、S. Kuroki¹、K. Kotani¹ (1.Tohoku Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.J-5-4