[J-5-4] Tri-Gate Poly-Si TFTs Fabricated by CW Laser Lateral Crystallization for Improvement of Electron Transport Properties

S. Fujii¹, Y. Kawasaki¹, S. Kuroki¹, K. Kotani¹ (1.Tohoku Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.J-5-4