[M-8-1] Impact on TFT Characteristics of Rapid Crystallization of Si using Nickel-Metal Induced Lateral Crystallization

S. Nagata¹、G. Nakagawa¹、T. Asano¹ (1.Kyushu Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.M-8-1