[M-8-4] Orientation Control of Al-Induced Crystallized Silicon by Diffusion Barrier Layers

A. Okada¹, K. Toko¹, K. Hara², N. Usami^2,3, T. Suemasu^1,3 (1.Univ. of Tsukuba, 2.Tohoku Univ., 3.CREST-JST , Japan)

https://doi.org/10.7567/SSDM.2011.M-8-4