[M-8-5] Phosphorus Mediated Growth of Ge Layer on Si(001) Substrate H. Hanafusa1、N. Hirose2、A. Kasamatsu2、T. Mimura2、T. Matsui2、Y. Suda1 (1.Tokyo Univ. of Agri. and Tech.、2.NICT , Japan) https://doi.org/10.7567/SSDM.2011.M-8-5