[M-8-5] Phosphorus Mediated Growth of Ge Layer on Si(001) Substrate

H. Hanafusa¹, N. Hirose², A. Kasamatsu², T. Mimura², T. Matsui², Y. Suda¹ (1.Tokyo Univ. of Agri. and Tech., 2.NICT , Japan)

https://doi.org/10.7567/SSDM.2011.M-8-5