[M-9-4L] Germanium layer Transfer with Epitaxial Lift-off Technique

T. Maeda¹, H. Ishii¹, T. Itatani¹, T. Takada², M. Hata², T. Yasuda¹ (1.AIST, 2.Sumitomo Chemical Co., Ltd. , Japan)

https://doi.org/10.7567/SSDM.2011.M-9-4L