[P-1-12] Comprehensive Understanding of Flatband Voltage Shift Based on Energy Band Alignment of the Whole Metal/high-k/SiO₂/Si Stack

X. Wang¹、W. Wang¹、K. Han¹、J. Zhang²、X. Ma¹、J. Xiang¹、D. Chen¹、T. Ye¹ (1.Chinese Academy of Sci.、2.North China Univ. of Tech. , China)

https://doi.org/10.7567/SSDM.2011.P-1-12