Comprehensive Understanding of Flatband Voltage Shift Based on Energy Band Alignment of the Whole Metal/high-k/SiO<sub>2</sub>/Si Stack

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

X. Wang¹, W. Wang¹, K. Han¹, J. Zhang², X. Ma¹, J. Xiang¹, D. Chen¹, T. Ye¹ (1.Chinese Academy of Sci., 2.North China Univ. of Tech. , China)