The Japan Society of Applied Physics

[P-1-13] Lateral Large-Grained Low-Temperature Polycrystalline Silicon-Germanium Thin-Film Transistors on Glass Substrate

Y. Okabe1, K. Kondo1, J. Suzuki2, K. Kitahara2, A. Hara1 (1.Tohoku Gakuin Univ., 2.Shimane Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.P-1-13