[P-1-9] Thermal Stability of Single and Alloy Noble Metals as for PMOS Gate Electrode

C. H. Choi¹, J. Ahn¹, R. Choi² (1.Hanyang Univ., 2.Inha Univ. , Korea)

https://doi.org/10.7567/SSDM.2011.P-1-9