[P-11-5] Scaling of the Pull-In Voltage in a Novel CMOS-compatible NEMS Switch

D. J. Baek¹、S. J. Choi¹、D. I. Moon¹、Y. K. Choi¹ (1.KAIST , Korea)

https://doi.org/10.7567/SSDM.2011.P-11-5