Scaling of the Pull-In Voltage in a Novel CMOS-compatible NEMS Switch

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

D. J. Baek¹, S. J. Choi¹, D. I. Moon¹, Y. K. Choi¹ (1.KAIST , Korea)