[P-14-18] High accurate TCAD calibration methodology realizing smart-design of integrated power devices consisting of lateral-IGBT & Diode in SOI micro-inverters
H. Kato1, S. Harada1, C. S. Yun2, V. Meniailenko2, Y. Ashida1, S. Takahashi1, N. Tokura1
(1.DENSO Corp. , Japan, 2.Synopsys Inc. , USA)
https://doi.org/10.7567/SSDM.2011.P-14-18