[P-14-18] High accurate TCAD calibration methodology realizing smart-design of integrated power devices consisting of lateral-IGBT & Diode in SOI micro-inverters

H. Kato¹、S. Harada¹、C. S. Yun²、V. Meniailenko²、Y. Ashida¹、S. Takahashi¹、N. Tokura¹ (1.DENSO Corp. , Japan、2.Synopsys Inc. , USA)

https://doi.org/10.7567/SSDM.2011.P-14-18