MIM Capacitors with High Capacitance Density and Low Quadratic Voltage Coefficient by Employing Crystalline-TiO<sub>2</sub>/SiO<sub>2</sub> Stacked Dielectric

2011 International Conference on Solid State Devices and Materials

2011年9月27日〜 2011年9月30日
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

C. C. Lin¹、W. Y. Ou¹、J. R. Wu¹、M. L. Wu¹、L. L. Chen¹、Y. H. Wu¹ (1.National Tsing Hua Univ. , Taiwan)