[P-3-10] Integration of InGaAs Nanowire Vertical Surrounding-Gate Transistors on Si

K. Tomioka^1,2、M. Yoshimura¹、T. Fukui¹ (1.Hokkaido Univ.、2.PRESTO-JST , Japan)

https://doi.org/10.7567/SSDM.2011.P-3-10