[P-7-20] Characterization of the Oxide Film Obtained by Wet Oxidation of Al_xGa_1-xAs with x=0.55-0.99

Y. Hirai¹、T. Yamada¹、M. Kondow¹、F. Ishikawa¹ (1.Osaka Univ. , Japan)

https://doi.org/10.7567/SSDM.2011.P-7-20