Characterization of the Oxide Film Obtained by Wet Oxidation of Al<sub>x</sub>Ga<sub>1-x</sub>As with x=0.55-0.99

2011 International Conference on Solid State Devices and Materials

Sep 27, 2011 - Sep 30, 2011
Aichi Industry & Labor Center (WINC AICHI), Nagoya, Japan

Y. Hirai¹, T. Yamada¹, M. Kondow¹, F. Ishikawa¹ (1.Osaka Univ. , Japan)