[P-8-22] The bias-crystallization mechanism on structural characteristics and electrical properties of Zn-In-Sn-O film

F. Y. Hung¹, S. J. Chang¹, T. S. Lui¹, S. P. Chang¹, Z. S. Hu¹, T. P. Chen¹, T. Y. Liao¹ (1.National Cheng Kung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2011.P-8-22