[P-8-22] The bias-crystallization mechanism on structural characteristics and electrical properties of Zn-In-Sn-O film

F. Y. Hung¹、S. J. Chang¹、T. S. Lui¹、S. P. Chang¹、Z. S. Hu¹、T. P. Chen¹、T. Y. Liao¹ (1.National Cheng Kung Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2011.P-8-22