Characterization of carbon nanotubes based vertical interconnects.

B. Vereecke; M. H. Van der Veen; Y. Barbarin; M. Sugiura; Y. Kashiwagi; D. J. Cott; C. Huyghebaert; Z. Tokei

doi:https://doi.org/10.7567/SSDM.2012.C-1-2

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[C-1-2] Characterization of carbon nanotubes based vertical interconnects.

B. Vereecke¹, M. H. Van der Veen¹, Y. Barbarin¹, M. Sugiura², Y. Kashiwagi², D. J. Cott¹, C. Huyghebaert¹, Z. Tokei¹ (1.IMEC , Belgium, 2.Tokyo Electron Ltd , Japan)

https://doi.org/10.7567/SSDM.2012.C-1-2

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