[D-1-4] RMG Tech. Integration in FinFET Devices

G. Boccardi¹、R. Ritzenthaler¹、M. Togo¹、T. Chiarella¹、M. S. Kim¹、S. Yuichiro¹、A. Veloso¹、S. A. Chew¹、E. Vecchio¹、S. Locorotondo¹、K. Devriendt¹、P. Ong¹、S. Brus¹、N. Horiguchi¹、A. Thean¹ (1.IMEC , Belgium)

https://doi.org/10.7567/SSDM.2012.D-1-4