[E-2-2] Investigation and Comparison of Work Function Variation for FinFET and Ultra-Thin-Body SOI Devices Using a Voronoi Approach

S. H. Chao¹、M. L. Fan¹、P. Su¹ (1.Univ. of National Chiao Tung , Taiwan)

https://doi.org/10.7567/SSDM.2012.E-2-2