[E-3-1] III-V/Ge Channel MOS Transistor Technologies for Advanced CMOS

S. Takagi¹、S. H. Kim¹、R. Zhang¹、M. Yokoyama¹、N. Taoka^1,2、M. Takenaka¹ (1.Univ. of Tokyo、2.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.E-3-1