[E-3-1] III-V/Ge Channel MOS Transistor Technologies for Advanced CMOS

S. Takagi¹, S. H. Kim¹, R. Zhang¹, M. Yokoyama¹, N. Taoka^1,2, M. Takenaka¹ (1.Univ. of Tokyo, 2.Nagoya Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.E-3-1