[E-4-4] Sub-10-nm nano-sheet channel of Junctionless Poly-Si TFT with oxidation thinning method

Y. C. Cheng¹、H. B. Chen²、J. J. Wu²、M. H. Han²、Y. C. Wu¹、C. Y. Chang² (1.Univ. of National Tsing Hua、2.Univ. of National Chiao Tung , Taiwan)

https://doi.org/10.7567/SSDM.2012.E-4-4