[E-4-4] Sub-10-nm nano-sheet channel of Junctionless Poly-Si TFT with oxidation thinning method

Y. C. Cheng¹, H. B. Chen², J. J. Wu², M. H. Han², Y. C. Wu¹, C. Y. Chang² (1.Univ. of National Tsing Hua, 2.Univ. of National Chiao Tung , Taiwan)

https://doi.org/10.7567/SSDM.2012.E-4-4