[E-5-3] Si1-yGey or Ge1-zSnz Source/Drain Stressors on Strained Si1-xGex-Channel PFETS: A TCAD Study

G. Eneman¹、A. De Keersgieter¹、L. Witters¹、J. Mitard¹、B. Vincent¹、A. Hikavyy¹、R. Loo¹、N. Horiguchi¹、N. Collaert¹、A. Thean¹ (1.IMEC , Belgium)

https://doi.org/10.7567/SSDM.2012.E-5-3