[E-5-3] Si1-yGey or Ge1-zSnz Source/Drain Stressors on Strained Si1-xGex-Channel PFETS: A TCAD Study

G. Eneman¹, A. De Keersgieter¹, L. Witters¹, J. Mitard¹, B. Vincent¹, A. Hikavyy¹, R. Loo¹, N. Horiguchi¹, N. Collaert¹, A. Thean¹ (1.IMEC , Belgium)

https://doi.org/10.7567/SSDM.2012.E-5-3