The Japan Society of Applied Physics

[E-6-1] Design-friendly scalability of cost-effective 28LP Tech. platform featuring 2nd generation gate-first HK/MG transistors without eSiGe

H. Fukutome1、S. D. Kwon1、S. Maeda1、S. Paak1 (1.System LSI business, Samsung Electronics Co., Ltd. , Korea)

https://doi.org/10.7567/SSDM.2012.E-6-1