[E-6-5L] Optimization of 14-nm Node Bulk/SOI FinFETs for SoC Platform: Thermal Conductivity, Operation Temperature, and Analog Performance Analysis

T. Takahashi^1,2, N. Beppu^1,2, S. Oda¹, K. Uchida^1,2 (1.Tokyo Inst. Tech., 2.Keio Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.E-6-5L