[E-6-5L] Optimization of 14-nm Node Bulk/SOI FinFETs for SoC Platform: Thermal Conductivity, Operation Temperature, and Analog Performance Analysis

T. Takahashi^1,2、N. Beppu^1,2、S. Oda¹、K. Uchida^1,2 (1.Tokyo Inst. Tech.、2.Keio Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.E-6-5L