Comprehensive Understandings on Reliability Modulations in Compressive Stressed (100)- and(110)-Orientated Silicon CMOSFETs

J. Chen; I. Hirano; M. Saitoh; K. Tatsumura; Y. Mitani

doi:https://doi.org/10.7567/SSDM.2012.E-7-1

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[E-7-1] Comprehensive Understandings on Reliability Modulations in Compressive Stressed (100)- and(110)-Orientated Silicon CMOSFETs

J. Chen¹, I. Hirano¹, M. Saitoh¹, K. Tatsumura¹, Y. Mitani¹ (1.Advanced LSI Tech. Lab., Corporate Research & Development Center, Toshiba Corp. , Japan)

https://doi.org/10.7567/SSDM.2012.E-7-1

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