[E-7-1] Comprehensive Understandings on Reliability Modulations in Compressive Stressed (100)- and(110)-Orientated Silicon CMOSFETs

J. Chen¹、I. Hirano¹、M. Saitoh¹、K. Tatsumura¹、Y. Mitani¹ (1.Advanced LSI Tech. Lab., Corporate Research & Development Center, Toshiba Corp. , Japan)

https://doi.org/10.7567/SSDM.2012.E-7-1