The Japan Society of Applied Physics

[E-9-2] Novel Extraction Method for Source and Drain Series Resistances in Silicon Nanowire MOSFETs Based on Radio-Frequency Analysis

K. R. Kim1, S. Shin1, S. Cho2, J. H. Lee3, I. M. Kang3 (1.Ulsan National Inst. of Sci. and Tech. , Korea, 2.Stanford Univ. , USA, 3.Kyungpook National Univ. , Korea)

https://doi.org/10.7567/SSDM.2012.E-9-2