[E-9-2] Novel Extraction Method for Source and Drain Series Resistances in Silicon Nanowire MOSFETs Based on Radio-Frequency Analysis

K. R. Kim¹、S. Shin¹、S. Cho²、J. H. Lee³、I. M. Kang³ (1.Ulsan National Inst. of Sci. and Tech. , Korea、2.Stanford Univ. , USA、3.Kyungpook National Univ. , Korea)

https://doi.org/10.7567/SSDM.2012.E-9-2