[E-9-3] A Novel and Direct Measurement of the Mobility on Very Small Dimension CMOS Devices with Channel Length Down to 20nm

E. R. Hsieh¹, S. Chung¹, C. H. Tsai², R. M. Huang², C. T. Tsai², C. W. Liang² (1.National Chiao Tung Univ., 2.UMC , Taiwan)

https://doi.org/10.7567/SSDM.2012.E-9-3