[E-9-3] A Novel and Direct Measurement of the Mobility on Very Small Dimension CMOS Devices with Channel Length Down to 20nm

E. R. Hsieh¹、S. Chung¹、C. H. Tsai²、R. M. Huang²、C. T. Tsai²、C. W. Liang² (1.National Chiao Tung Univ.、2.UMC , Taiwan)

https://doi.org/10.7567/SSDM.2012.E-9-3