The Japan Society of Applied Physics

[F-4-2] Low Leakage Current for 1.6kV Breakdown GaN HFET with 6um-thick Semi-insulating GaN on 6-inch Si

S. M. Cho1, E. J. Hwang1, J. M. Kim1, J. H. Kim1, J. H. Shin1, J. Park1, Y. J. Jo1, W. S. Kim1, H. J. Lee1, K. Kim1, T. Jang1 (1.LG Electronics , Korea)

https://doi.org/10.7567/SSDM.2012.F-4-2