The Japan Society of Applied Physics

[F-6-3] Lateral High-Voltage 4H-SiC IGBTs

W. S. Lee1、C. Y. Cheng1、K. W. Chu1、C. F. Huang1、F. Zhao2、L. S. Lee3、Y. S. Chen3、C. Y. Lee3、M. J. Tsai3 (1.National Tsing Hua Univ. , Taiwan、2.Washington State Univ. , USA、3.Indus. Tech. Res. Inst. , Taiwan)

https://doi.org/10.7567/SSDM.2012.F-6-3