High-Performance Transparent Top-Gate AZO TFTs Fabricated by Low-Temperature Process

J. Cai; D. D. Han; Y. F. Geng; W. Wang; L. L. Wang; Y. Tian; H. K. Yao; L. X. Qian; S. D. Zhang; Y. Wang

doi:https://doi.org/10.7567/SSDM.2012.F-8-3

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜 2012年9月27日
Kyoto International Conference Center, Kyoto, Japan

[F-8-3] High-Performance Transparent Top-Gate AZO TFTs Fabricated by Low-Temperature Process

J. Cai¹、D. D. Han¹、Y. F. Geng¹、W. Wang¹、L. L. Wang¹、Y. Tian¹、H. K. Yao¹、L. X. Qian²、S. D. Zhang¹、Y. Wang¹ (1.Peking Univ.、2.Beijing Inst. of Tech. , China)

https://doi.org/10.7567/SSDM.2012.F-8-3

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