High-Performance Transparent Top-Gate AZO TFTs Fabricated by Low-Temperature Process

J. Cai; D. D. Han; Y. F. Geng; W. Wang; L. L. Wang; Y. Tian; H. K. Yao; L. X. Qian; S. D. Zhang; Y. Wang

doi:https://doi.org/10.7567/SSDM.2012.F-8-3

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[F-8-3] High-Performance Transparent Top-Gate AZO TFTs Fabricated by Low-Temperature Process

J. Cai¹, D. D. Han¹, Y. F. Geng¹, W. Wang¹, L. L. Wang¹, Y. Tian¹, H. K. Yao¹, L. X. Qian², S. D. Zhang¹, Y. Wang¹ (1.Peking Univ., 2.Beijing Inst. of Tech. , China)

https://doi.org/10.7567/SSDM.2012.F-8-3

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