[H-6-3] MIM Capacitors with High Capacitance Density and Low Quadratic Voltage Coefficient Employing Canceling Effect by ZrLaOx/ZrTiOx/ZrLaOx Laminate Insulator

L. L. Chen¹、Y. B. Lin¹、C. C. Lin¹、Y. T. Chang¹、Y. H. Wu¹ (1.National Tsing Hua Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2012.H-6-3