The Japan Society of Applied Physics

[H-6-3] MIM Capacitors with High Capacitance Density and Low Quadratic Voltage Coefficient Employing Canceling Effect by ZrLaOx/ZrTiOx/ZrLaOx Laminate Insulator

L. L. Chen1、Y. B. Lin1、C. C. Lin1、Y. T. Chang1、Y. H. Wu1 (1.National Tsing Hua Univ. , Taiwan)

https://doi.org/10.7567/SSDM.2012.H-6-3