[H-6-3] MIM Capacitors with High Capacitance Density and Low Quadratic Voltage Coefficient Employing Canceling Effect by ZrLaOx/ZrTiOx/ZrLaOx Laminate Insulator
L. L. Chen1, Y. B. Lin1, C. C. Lin1, Y. T. Chang1, Y. H. Wu1
(1.National Tsing Hua Univ. , Taiwan)
https://doi.org/10.7567/SSDM.2012.H-6-3
