The Japan Society of Applied Physics

2012 International Conference on Solid State Devices and Materials

2012 International Conference on Solid State Devices and Materials

Sep 25, 2012 - Sep 27, 2012
Kyoto International Conference Center, Kyoto, Japan

[H-6-5] Fat damascene wires for high bandwidth routing in silicon interposer

M. Detalle1, J. Kim1, P. Nolmans1, X. Sun1, J. Ryckaert1, A. La Manna1, G. Beyer1, E. Beyne1 (1.InterUniv. MicroElectronics Center , Belgium)

https://doi.org/10.7567/SSDM.2012.H-6-5