[I-3-2] Fabrication and Characterization of MFIS Capacitor Structure with Ferroelectric (Bi,Pr)(Fe,Mn)O3 Thin Films

T. Kawae¹、Y. Seto¹、A. Morimoto¹ (1.Grad. School of Natural Sci. and Tech., Kanazawa Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.I-3-2