The Japan Society of Applied Physics

[K-2-3] Annealing Condition Optimization of Sputtered Amorphous Carbon for Large-grain, Multi-layer Graphene

M. Sato1, H. Nakano1, M. Takahashi1, T. Muro2, Y. Takakuwa3, S. Sato1, M. Nihei1, N. Yokoyama1 (1.AIST/GNC, 2.JASRI/SPring-8, 3.Tohoku Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.K-2-3