[K-2-3] Annealing Condition Optimization of Sputtered Amorphous Carbon for Large-grain, Multi-layer Graphene

M. Sato¹、H. Nakano¹、M. Takahashi¹、T. Muro²、Y. Takakuwa³、S. Sato¹、M. Nihei¹、N. Yokoyama¹ (1.AIST/GNC、2.JASRI/SPring-8、3.Tohoku Univ. , Japan)

https://doi.org/10.7567/SSDM.2012.K-2-3