Integrating carbon nanotubes as vias in a monolithic 3DIC process

S. Vollebregt; R. Ishihara; A.N. Chiaramonti; J. Bin Abdul Jalil; K. Beenakker

doi:https://doi.org/10.7567/SSDM.2012.K-2-4

2012 International Conference on Solid State Devices and Materials

2012年9月25日〜 2012年9月27日
Kyoto International Conference Center, Kyoto, Japan

[K-2-4] Integrating carbon nanotubes as vias in a monolithic 3DIC process

S. Vollebregt¹、R. Ishihara¹、A.N. Chiaramonti²、J. Bin Abdul Jalil¹、K. Beenakker¹ (1.Delft Univ. of Tech. , The Netherlands、2.National Inst. of Standards and Tech. , United States of America)

https://doi.org/10.7567/SSDM.2012.K-2-4

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